Center for Light-Matter Interaction, Sensors & Analytics (LISA+)

Facilities

The multidisciplinary nanostructure laboratory is the central research unit of LISA+.

It includes a cleanroom (total area 440 m2; 102 m2 class 1000 and 156 m2 class 10000)

and a lab space of more than 20 rooms (total area ∼800 m2).

The basic equipment of LISA+ can be assigned to four research areas:

  1. Thin film deposition
  2. Micro & nanopatterning
  3. Thin film / surface analytics
  4. Laser scanning microscopy, ultrafast lasers.

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